@book{24571,
	author = {Courtois, Bernard, ed.},
	title = {Design, Characterization, and Packaging for MEMS and Microelectronics},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3893},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3893}
}