TY  - BOOK
AU  - Rieger, Michael, ed.
TI  - Design for Manufacturability through Design-Process Integration V
T2  - Proceedings of SPIE; V. 7974
SN  - 9780819485335 (Print)
PY  - 2011///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7974
ER  -