TY  - BOOK
AU  - Rieger, Michael, ed.
TI  - Design for Manufacturability through Design-Process Integration IV
T2  - Proceedings of SPIE; V. 7641
SN  - 9780819480552 (Print)
PY  - 2010///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7641
ER  -