TY - BOOK AU - Singh, Vivek, ed. TI - Design for Manufacturability through Design-Process Integration III T2 - Proceedings of SPIE; V. 7275 SN - 9780819475282 (Print) PY - 2009/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7275 ER -