TY  - BOOK
AU  - Wong, Alfred, ed.
TI  - Design and Process Integration for Microelectronic Manufacturing IV
T2  - Proceedings of SPIE; V. 6156
SN  - 9780819461995 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6156
ER  -