00529nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245008100114260003200195300002000227490003300247856010300280IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819461995 (Print)  cIIA Library  aWong, Alfred, ed. 0aDesign and Process Integration for Microelectronic Manufacturing IVh[eBook]  aWashington, USAbSPIEc2006  aOnline resource  aProceedings of SPIE; V. 6156  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6156yClick Here to Access eBook