@book{24546,
	author = {Wong, Alfred, ed.},
	title = {Design and Process Integration for Microelectronic Manufacturing IV},
	publisher = {SPIE},
	year = {2006},
	series = {Proceedings of SPIE; V. 6156},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6156}
}