TY  - BOOK
AU  - Liebmann, Lars, ed.
TI  - Design and Process Integration for Microelectronic Manufacturing II
T2  - Proceedings of SPIE; V. 5379
SN  - 9780819452924 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5379
ER  -