@book{24544,
	author = {Liebmann, Lars, ed.},
	title = {Design and Process Integration for Microelectronic Manufacturing II},
	publisher = {SPIE},
	year = {2004},
	series = {Proceedings of SPIE; V. 5379},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5379}
}