TY  - BOOK
AU  - Starikov, Alexander, ed.
TI  - Design and Process Integration for Microelectronic Manufacturing
T2  - Proceedings of SPIE; V. 5042
SN  - 9780819448477 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5042
ER  -