@book{24543,
	author = {Starikov, Alexander, ed.},
	title = {Design and Process Integration for Microelectronic Manufacturing},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5042},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5042}
}