00541nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002100119245005300140260003200193300002000225490003400245856010400279IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510609730 (Print)  a9781510609747 (Online)  cIIA Library  aJuha, Libor, ed. 0aDamage to VUV, EUV, and X-ray Optics VIh[eBook]  aWashington, USAbSPIEc2017  aOnline resource  aProceedings of SPIE; V. 10236  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10236yClick Here to Access eBook