00499nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245005200113260003200165300002000197490003300217856010300250IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628416329 (Print)  cIIA Library  aJuha, Libor, ed. 0aDamage to VUV, EUV, and X-ray Optics Vh[eBook]  aWashington, USAbSPIEc2015  aOnline resource  aProceedings of SPIE; V. 9511  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9511yClick Here to Access eBook