TY  - BOOK
AU  - Wong, Alfred, ed.
TI  - Cost and Performance in Integrated Circuit Creation
T2  - Proceedings of SPIE; V. 5043
SN  - 9780819448484 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5043
ER  -