TY  - BOOK
AU  - Gopalam, B., ed.
TI  - Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits
T2  - Proceedings of SPIE; V. 1523
SN  - 9780819406514 (Print)
PY  - 1992///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1523
ER  -