00546nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245009900113260003200212300002000244490003300264856010300297IN-BaIIA211028s9999 xx s 000 0 eng d a9780819406514 (Print) cIIA Library aGopalam, B., ed. 0aConference on Physics and Technology of Semiconductor Devices and Integrated Circuitsh[eBook] aWashington, USAbSPIEc1992 aOnline resource aProceedings of SPIE; V. 1523 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1523yClick Here to Access eBook