00494nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245004600114260003200160300002000192490003300212856010300245IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819433084 (Print)  cIIA Library  aVeiko, Vadim, ed. 0aComputer-Controlled Microshapingh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3822  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3822yClick Here to Access eBook