TY  - BOOK
AU  - Baker, Lionel, ed.
TI  - Commercial Applications of Precision Manufacturing at the Sub-Micron Level
T2  - Proceedings of SPIE; V. 1573
SN  - 9780819407030 (Print)
PY  - 1992///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1573
ER  -