00539nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245008800115260003400203300002000237490003300257856010300290IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819407030 (Print)  cIIA Library  aBaker, Lionel, ed. 0aCommercial Applications of Precision Manufacturing at the Sub-Micron Levelh[eBook]  aWashington, USAbSPIEc1992    aOnline resource  aProceedings of SPIE; V. 1573  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1573yClick Here to Access eBook