@book{24295,
	author = {Baker, Lionel, ed.},
	title = {Commercial Applications of Precision Manufacturing at the Sub-Micron Level},
	publisher = {SPIE},
	year = {1992  },
	series = {Proceedings of SPIE; V. 1573},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1573}
}