00488nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245004100113260003200154300002000186490003300206856010300239IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819425775 (Print)  cIIA Library  aMunro, Eric, ed. 0aCharged Particle Optics IIIh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3155  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3155yClick Here to Access eBook