TY  - BOOK
AU  - Burnett, David, ed.
TI  - Challenges in Process Integration and Device Technology
T2  - Proceedings of SPIE; V. 4181
SN  - 9780819438423 (Print)
PY  - 2000///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4181
ER  -