@book{24101,
	author = {Burnett, David, ed.},
	title = {Challenges in Process Integration and Device Technology},
	publisher = {SPIE},
	year = {2000},
	series = {Proceedings of SPIE; V. 4181},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4181}
}