TY - BOOK AU - Kish, Laszlo, ed. TI - BioMEMS and Smart Nanostructures T2 - Proceedings of SPIE; V. 4590 SN - 9780819443205 (Print) PY - 2001/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4590 ER -