TY  - BOOK
AU  - Nicolau, Dan, ed.
TI  - BioMEMS and Nanotechnology
T2  - Proceedings of SPIE; V. 5275
SN  - 9780819451682 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5275
ER  -