00488nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245004000114260003200154300002000186490003300206856010300239IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819451682 (Print)  cIIA Library  aNicolau, Dan, ed. 0aBioMEMS and Nanotechnologyh[eBook]  aWashington, USAbSPIEc2004  aOnline resource  aProceedings of SPIE; V. 5275  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5275yClick Here to Access eBook