@book{23985,
	author = {Nicolau, Dan, ed.},
	title = {BioMEMS and Nanotechnology},
	publisher = {SPIE},
	year = {2004},
	series = {Proceedings of SPIE; V. 5275},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5275}
}