00531nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002100119245004300140260003200183300002000215490003400235856010400269IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510628977 (Print)  a9781510628984 (Online)  cIIA Library  aNovak, Erik, ed. 0aApplied Optical Metrology IIIh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 11102  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11102yClick Here to Access eBook