@book{23734,
	author = {Novak, Erik, ed.},
	title = {Applied Optical Metrology III},
	publisher = {SPIE},
	year = {2019},
	series = {Proceedings of SPIE; V. 11102},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11102}
}