00530nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002100119245004200140260003200182300002000214490003400234856010400268IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510612037 (Print)  a9781510612044 (Online)  cIIA Library  aNovak, Erik, ed. 0aApplied Optical Metrology IIh[eBook]  aWashington, USAbSPIEc2017  aOnline resource  aProceedings of SPIE; V. 10373  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10373yClick Here to Access eBook