Novak, Erik, ed. <br/><br/>
Applied Optical Metrology II  [eBook] 

 - Washington, USA  SPIE  2017 
 - Online resource 
 - Proceedings of SPIE; V. 10373 .
<br/><br/><label>ISBN: </label>9781510612037 (Print) 9781510612044 (Online)