TY  - BOOK
AU  - Novak, Erik, ed.
TI  - Applied Advanced Optical Metrology Solutions
T2  - Proceedings of SPIE; V. 9576
SN  - 9781628417425 (Print)
PY  - 2015///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9576
ER  -