00752nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002500092245007900117260003200196300002000228490003300248856010300281942000700384999001700391952016200408IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892524518 (Print)  cIIA Library  aLee, Jar, ed.942181 0aApplications of Optical Metrology: Techniques and Measurements IIh[eBook]  aWashington, USAbSPIEc1983  aOnline resource  aProceedings of SPIE; V. 0416  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0416yClick Here to Access eBook  cEB  c23715d23715  00104070aBANbBANd2011-07-01eSPIEhV. 416l0pEB3175r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0416w2021-11-05yEB