TY  - BOOK
AU  - Lee, Jar, ed.
TI  - Applications of Optical Metrology: Techniques and Measurements II
T2  - Proceedings of SPIE; V. 0416
SN  - 9780892524518 (Print)
PY  - 1983///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0416
ER  -