00523nam a2200145Ia 4500003000900000008004100009020002600050040001600076100001800092245007900110260003200189300002000221490003300241856010300274IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892524518 (Print)  cIIA Library  aLee, Jar, ed. 0aApplications of Optical Metrology: Techniques and Measurements IIh[eBook]  aWashington, USAbSPIEc1983  aOnline resource  aProceedings of SPIE; V. 0416  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0416yClick Here to Access eBook