@book{23715,
	author = {Lee, Jar, ed.},
	title = {Applications of Optical Metrology: Techniques and Measurements II},
	publisher = {SPIE},
	year = {1983},
	series = {Proceedings of SPIE; V. 0416},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0416}
}