TY  - BOOK
AU  - Bencher, Christopher, ed.
TI  - Alternative Lithographic Technologies VIII
T2  - Proceedings of SPIE; V. 9777
SN  - 9781510600126 (Print)
PY  - 2016///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9777
ER  -