00512nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003000092245005600122260003200178300002000210490003300230856010300263IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510600126 (Print)  cIIA Library  aBencher, Christopher, ed. 0aAlternative Lithographic Technologies VIIIh[eBook]  aWashington, USAbSPIEc2016  aOnline resource  aProceedings of SPIE; V. 9777  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9777yClick Here to Access eBook