@book{23533,
	author = {Bencher, Christopher, ed.},
	title = {Alternative Lithographic Technologies VIII},
	publisher = {SPIE},
	year = {2016},
	series = {Proceedings of SPIE; V. 9777},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9777}
}