TY  - BOOK
AU  - Resnick, Douglas, ed.
TI  - Alternative Lithographic Technologies VII
T2  - Proceedings of SPIE; V. 9423
SN  - 9781628415254 (Print)
PY  - 2015///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9423
ER  -