@book{23532,
	author = {Resnick, Douglas, ed.},
	title = {Alternative Lithographic Technologies VII},
	publisher = {SPIE},
	year = {2015},
	series = {Proceedings of SPIE; V. 9423},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9423}
}