TY  - BOOK
AU  - Resnick, Douglas, ed.
TI  - Alternative Lithographic Technologies VI
T2  - Proceedings of SPIE; V. 9049
SN  - 9780819499721 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9049
ER  -