00502nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245005300115260003200168300002000200490003300220856010300253IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819494627 (Print)  cIIA Library  aTong, William, ed. 0aAlternative Lithographic Technologies Vh[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 8680  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8680yClick Here to Access eBook