@book{23530,
	author = {Tong, William, ed.},
	title = {Alternative Lithographic Technologies V},
	publisher = {SPIE},
	year = {2013},
	series = {Proceedings of SPIE; V. 8680},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8680}
}