TY  - BOOK
AU  - Tong, William, ed.
TI  - Alternative Lithographic Technologies IV
T2  - Proceedings of SPIE; V. 8323
SN  - 9780819489791 (Print)
PY  - 2012///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8323
ER  -