TY  - BOOK
AU  - Herr, Daniel, ed.
TI  - Alternative Lithographic Technologies III
T2  - Proceedings of SPIE; V. 7970
SN  - 9780819485298 (Print)
PY  - 2011///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7970
ER  -