@book{23527,
	author = {Herr, Daniel, ed.},
	title = {Alternative Lithographic Technologies II},
	publisher = {SPIE},
	year = {2010},
	series = {Proceedings of SPIE; V. 7637},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7637}
}