@book{23526,
	author = {Schellenberg, Frank, ed.},
	title = {Alternative Lithographic Technologies},
	publisher = {SPIE},
	year = {2009},
	series = {Proceedings of SPIE; V. 7271},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7271}
}