@book{23361,
	author = {Willson, C. Grant, ed.},
	title = {Advances in Resist Technology I},
	publisher = {SPIE},
	year = {1984},
	series = {Proceedings of SPIE; V. 0469},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0469}
}