TY  - BOOK
AU  - Lin, Qinghuang, ed.
TI  - Advances in Resist Technology and Processing XXIII
T2  - Proceedings of SPIE; V. 6153
SN  - 9780819461964 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6153
ER  -